Daily Papers

Shrinking pattern dimensions leads to an increased variety of defect types in semiconductor devices. This has spurred innovation in patterning approaches such as Directed self-assembly (DSA) for which no traditional, automatic defect inspection software exists. Machine Learning-based SEM image analysis has become an increasingly popular research topic for defect inspection with supervised ML models often showing the best performance. However, little research has been done on obtaining a dataset with high-quality labels for these supervised models. In this work, we propose a method for obtaining coherent and complete labels for a dataset of hexagonal contact hole DSA patterns while requiring minimal quality control effort from a DSA expert. We show that YOLOv8, a state-of-the-art neural network, achieves defect detection precisions of more than 0.9 mAP on our final dataset which best reflects DSA expert defect labeling expectations. We discuss the strengths and limitations of our proposed labeling approach and suggest directions for future work in data-centric ML-based defect inspection.

Carbon nanotubes (CNTs) are critical building blocks in nanotechnology, yet the characterization of their dynamic growth is limited by the experimental challenges in nanoscale motion measurement using scanning electron microscopy (SEM) imaging. Existing ex situ methods offer only static analysis, while in situ techniques often require manual initialization and lack continuous per-particle trajectory decomposition. We present Visual Feature Tracking (VFTrack) an in-situ real-time particle tracking framework that automatically detects and tracks individual CNT particles in SEM image sequences. VFTrack integrates handcrafted or deep feature detectors and matchers within a particle tracking framework to enable kinematic analysis of CNT micropillar growth. A systematic using 13,540 manually annotated trajectories identifies the ALIKED detector with LightGlue matcher as an optimal combination (F1-score of 0.78, alpha-score of 0.89). VFTrack motion vectors decomposed into axial growth, lateral drift, and oscillations, facilitate the calculation of heterogeneous regional growth rates and the reconstruction of evolving CNT pillar morphologies. This work enables advancement in automated nano-material characterization, bridging the gap between physics-based models and experimental observation to enable real-time optimization of CNT synthesis.